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Patent Searching and Data


Document Type and Number:
Japanese Patent JPS62161756
Kind Code:
U
Application Number:
JP5025986U
Publication Date:
October 14, 1987
Filing Date:
April 03, 1986
Export Citation:
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International Classes:
G01N27/62; G01L21/10; H01J49/24; (IPC1-7): H01J49/24; G01L21/10; G01N27/62



 
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