Document Type and Number:
Japanese Patent JPS62167436
Kind Code:
U
Application Number:
JP5386886U
Publication Date:
October 23, 1987
Filing Date:
April 10, 1986
Export Citation:
International Classes:
H01L33/00; H03K5/12; H03K17/78; H04B10/00; H04B10/40; H04B10/50; H04B10/516; H04B10/60; (IPC1-7): H04B9/00; H03K5/12
Previous Patent: JPS62167435
Next Patent: METHOD FOR MEASURING PARTICLE SIZE DISTRIBUTION OF FINE PARTICLE
Next Patent: METHOD FOR MEASURING PARTICLE SIZE DISTRIBUTION OF FINE PARTICLE