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Patent Searching and Data


Document Type and Number:
Japanese Patent JPS62168644
Kind Code:
U
Application Number:
JP5586786U
Publication Date:
October 26, 1987
Filing Date:
April 14, 1986
Export Citation:
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International Classes:
H01L21/683; H01L21/67; H01L21/68; (IPC1-7): H01L21/68



 
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