Document Type and Number:
Japanese Patent JPS62186078
Kind Code:
U
Application Number:
JP7410886U
Publication Date:
November 26, 1987
Filing Date:
May 16, 1986
Export Citation:
International Classes:
G01R31/26; G01R31/28; H01L21/66; (IPC1-7): G01R31/28; G01R31/26; H01L21/66