Document Type and Number:
Japanese Patent JPS62199812
Kind Code:
U
Application Number:
JP8552186U
Publication Date:
December 19, 1987
Filing Date:
June 05, 1986
Export Citation:
International Classes:
G12B5/00; G05D3/00; G05D3/12; H01L21/68; H05K13/04; (IPC1-7): G05D3/00; G05D3/12; G12B5/00; H01L21/68; H05K13/04