Document Type and Number:
Japanese Patent JPS62201928
Kind Code:
U
Application Number:
JP9015186U
Publication Date:
December 23, 1987
Filing Date:
June 13, 1986
Export Citation:
International Classes:
H01L21/673; H01L21/22; H01L21/67; H01L21/68; (IPC1-7): H01L21/22; H01L21/68
Domestic Patent References:
| JPS516664A | 1976-01-20 | |||
| JPS57167625A | 1982-10-15 |