Document Type and Number:
Japanese Patent JPS6226028
Kind Code:
U
Application Number:
JP11622185U
Publication Date:
February 17, 1987
Filing Date:
July 29, 1985
Export Citation:
International Classes:
F27D9/00; H01L21/205; H01L21/22; H01L21/31; (IPC1-7): H01L21/22; F27D9/00; H01L21/205; H01L21/31