Document Type and Number:
Japanese Patent JPS6282561
Kind Code:
U
Application Number:
JP17353585U
Publication Date:
May 26, 1987
Filing Date:
November 13, 1985
Export Citation:
International Classes:
F04B37/16; F04B49/00; F04B49/06; G01L21/00; G05D16/00; H01J37/18; H01J49/24; H01L21/302; H01L21/3065; (IPC1-7): H01J37/18; F04B37/16; F04B49/00; G01L21/00; G05D16/00; H01J49/24; H01L21/302