Document Type and Number:
Japanese Patent JPS6314496
Kind Code:
B2
Inventors:
EBIHARA JUJI
Application Number:
JP15325182A
Publication Date:
March 31, 1988
Filing Date:
August 31, 1982
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
G01N21/88; G01N21/93; G01N21/956; G06T1/00; H01L21/66
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