Document Type and Number:
Japanese Patent JPS63149058
Kind Code:
U
Application Number:
JP4142087U
Publication Date:
September 30, 1988
Filing Date:
March 20, 1987
Export Citation:
International Classes:
G01N23/225; G02B7/28; H01J37/21; H01J37/22; (IPC1-7): H01J37/21; G01N23/225; G02B7/11; H01J37/22
Domestic Patent References:
| JPS60189856A | 1985-09-27 |