Document Type and Number:
Japanese Patent JPS63167765
Kind Code:
U
Application Number:
JP6027287U
Publication Date:
November 01, 1988
Filing Date:
April 21, 1987
Export Citation:
International Classes:
H01L33/62; H01S5/00; H01S5/026; (IPC1-7): H01S3/18; H01L33/00