Document Type and Number:
Japanese Patent JPS63175078
Kind Code:
U
Application Number:
JP6320487U
Publication Date:
November 14, 1988
Filing Date:
April 24, 1987
Export Citation:
International Classes:
B65D85/86; B65D85/38; H01L21/02; H01L21/673; H01L21/68; H01L23/00; (IPC1-7): B65D85/38; H01L21/02; H01L21/68; H01L23/00