Document Type and Number:
Japanese Patent JPS63183273
Kind Code:
U
Application Number:
JP7353787U
Publication Date:
November 25, 1988
Filing Date:
May 15, 1987
Export Citation:
International Classes:
C30B11/00; H01L21/20; H01L21/208; (IPC1-7): C30B11/00; H01L21/20; H01L21/208