Document Type and Number:
Japanese Patent JPS63189332
Kind Code:
U
Application Number:
JP7802287U
Publication Date:
December 06, 1988
Filing Date:
May 23, 1987
Export Citation:
International Classes:
G01L21/30; B01J3/00; (IPC1-7): B01J3/00; G01L21/30
Domestic Patent References:
JPS5952085B2 | 1984-12-18 | |||
JPS61243651A | 1986-10-29 | |||
JPS57163836A | 1982-10-08 |