Document Type and Number:
Japanese Patent JPS6327065
Kind Code:
U
Application Number:
JP12110086U
Publication Date:
February 22, 1988
Filing Date:
August 06, 1986
Export Citation:
International Classes:
H01L23/48; H01L31/04; H01L31/042; (IPC1-7): H01L31/04; H01L23/48