Document Type and Number:
Japanese Patent JPS633227
Kind Code:
Y2
Application Number:
JP11142286U
Publication Date:
January 27, 1988
Filing Date:
July 22, 1986
Export Citation:
International Classes:
H01L27/04; H01L21/822; H03H19/00; (IPC1-7): H03H19/00; H01L27/04
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