Document Type and Number:
Japanese Patent JPS6341566
Kind Code:
Y2
Application Number:
JP998783U
Publication Date:
November 01, 1988
Filing Date:
January 28, 1983
Export Citation:
International Classes:
F02M25/08; F02M23/04; (IPC1-7): F02M25/08; F02M23/04; F02M25/08
Previous Patent: A flange for plasma cavities, a plasma cavity, and a plasma CVD device
Next Patent: JPS6341567
Next Patent: JPS6341567