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Patent Searching and Data


Document Type and Number:
Japanese Patent JPS6348186
Kind Code:
B2
Inventors:
URYA SUSUMU
GONDAI JUJI
Application Number:
JP16978883A
Publication Date:
September 28, 1988
Filing Date:
September 14, 1983
Export Citation:
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Assignee:
NIPPON DENKI KK
NIPPON DENKI AISHII MAIKON SHISUTEMU KK
International Classes:
H01L27/04; H01L21/822; H01L27/10



 
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