Document Type and Number:
Japanese Patent JPS6348598
Kind Code:
B2
Inventors:
TOKOROYAMA FUKUSABURO
SUNAYAMA SEIJI
SUNAYAMA SEIJI
Application Number:
JP23349083A
Publication Date:
September 29, 1988
Filing Date:
December 13, 1983
Export Citation:
Assignee:
TASU GIJUTSU KENKYUSHO JUGEN
International Classes:
B08B3/08; G03F1/00; G03F1/82; H01L21/304