Title:
【発明の名称】集積回路校正装置
Document Type and Number:
Japanese Patent JPS63500907
Kind Code:
A
Inventors:
Edison, Iron Gregory
Back, brian jeffrey
John Sparrow
Back, brian jeffrey
John Sparrow
Application Number:
JP50355186A
Publication Date:
March 31, 1988
Filing Date:
June 13, 1986
Export Citation:
Assignee:
Press-over-limits
International Classes:
G01R31/26; G01R1/073; G01R35/00; H01L21/66; (IPC1-7): G01R31/26; G01R35/00; H01L21/66
Attorney, Agent or Firm:
Asamura Akira