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Patent Searching and Data


Document Type and Number:
Japanese Patent JPS6351664
Kind Code:
U
Application Number:
JP14602986U
Publication Date:
April 07, 1988
Filing Date:
September 24, 1986
Export Citation:
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International Classes:
B05B5/08; B05C3/09; B05C13/00; B05C19/02; H01L21/56; (IPC1-7): B05B5/08; B05C3/09; B05C13/00; B05C19/02; H01L21/56