Document Type and Number:
Japanese Patent JPS6371531
Kind Code:
U
Application Number:
JP16725986U
Publication Date:
May 13, 1988
Filing Date:
October 30, 1986
Export Citation:
International Classes:
B29C45/02; B29C45/14; B29C45/26; B29C45/58; H01L21/56; B29L31/34; (IPC1-7): H01L21/56; B29C45/02; B29C45/14; B29C45/26; B29C45/58; B29L31:34