Document Type and Number:
Japanese Patent JPS6373937
Kind Code:
U
Application Number:
JP16771686U
Publication Date:
May 17, 1988
Filing Date:
October 30, 1986
Export Citation:
International Classes:
H01L21/67; H01L21/68; (IPC1-7): H01L21/68
Domestic Patent References:
| JPS605126B2 | 1985-02-08 | |||
| JPS5011652A | 1975-02-06 |