Document Type and Number:
Japanese Patent JPS6379964
Kind Code:
U
More Like This:
Application Number:
JP17354386U
Publication Date:
May 26, 1988
Filing Date:
November 12, 1986
Export Citation:
International Classes:
A63B65/10; (IPC1-7): A63B65/10
Previous Patent: 非吸着性積層体
Next Patent: DEVICE FOR CORRECTING FEED AND ROTATION ERROR IN CONVEYOR FOR ULTRAHIGH VACUUM
Next Patent: DEVICE FOR CORRECTING FEED AND ROTATION ERROR IN CONVEYOR FOR ULTRAHIGH VACUUM