Document Type and Number:
Japanese Patent JPS6412383
Kind Code:
B2
Inventors:
OOE AKIHIKO
FUSE MASAKI
FUSE MASAKI
Application Number:
JP23307882A
Publication Date:
February 28, 1989
Filing Date:
December 28, 1982
Export Citation:
Assignee:
MITSUBISHI RAYON CO
International Classes:
G01N21/956; G03F1/00; G03F1/84; H01L21/027; H01L21/66; H05K3/00