Document Type and Number:
Japanese Patent JPS6420734
Kind Code:
U
More Like This:
Application Number:
JP11576687U
Publication Date:
February 01, 1989
Filing Date:
July 27, 1987
Export Citation:
International Classes:
H01L21/68; H01L21/78; (IPC1-7): H01L21/68; H01L21/78
Domestic Patent References:
JPS5444679U | 1979-03-27 | |||
JPS53135280A | 1978-11-25 |