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Patent Searching and Data

Document Type and Number:
Japanese Patent JPS6420735
Kind Code:
Application Number:
Publication Date:
February 01, 1989
Filing Date:
July 28, 1987
Export Citation:
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International Classes:
B08B3/04; B65G1/00; H01L21/304; H01L21/68; (IPC1-7): H01L21/68; B08B3/04; B65G1/00; H01L21/304