Document Type and Number:
Japanese Patent JPS6420736
Kind Code:
U
Application Number:
JP11572387U
Publication Date:
February 01, 1989
Filing Date:
July 27, 1987
Export Citation:
International Classes:
B28D5/00; F16D65/14; H01L21/78; (IPC1-7): H01L21/78; B28D5/00; F16D65/14