Document Type and Number:
Japanese Patent JPS6420742
Kind Code:
U
Application Number:
JP11627587U
Publication Date:
February 01, 1989
Filing Date:
July 29, 1987
Export Citation:
International Classes:
H01L23/44; H01L23/46; H01L23/473; H05K7/20; (IPC1-7): H01L23/44; H05K7/20