Document Type and Number:
Japanese Patent JPS6438228
Kind Code:
U
Application Number:
JP13469887U
Publication Date:
March 07, 1989
Filing Date:
September 02, 1987
Export Citation:
International Classes:
B23P19/04; B25J15/06; F16B47/00; H01L21/02; H01L21/68; (IPC1-7): B23P19/04; B25J15/06; F16B47/00; H01L21/02; H01L21/68