Document Type and Number:
Japanese Patent JPS6447030
Kind Code:
U
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Application Number:
JP14077587U
Publication Date:
March 23, 1989
Filing Date:
September 14, 1987
Export Citation:
International Classes:
C30B19/08; H01L21/208; (IPC1-7): H01L21/208; C30B19/08
Domestic Patent References:
| JPS5438851U | 1979-03-14 | |||
| JPS62134926A | 1987-06-18 |