Document Type and Number:
Japanese Patent JPS6450050
Kind Code:
U
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Application Number:
JP14258287U
Publication Date:
March 28, 1989
Filing Date:
September 18, 1987
Export Citation:
International Classes:
B24B37/04; B24B37/30; H01L21/304; H01L21/68; (IPC1-7): B24B37/04; H01L21/304; H01L21/68