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Patent Searching and Data


Document Type and Number:
Japanese Patent JPS6450384
Kind Code:
U
Application Number:
JP14624087U
Publication Date:
March 28, 1989
Filing Date:
September 25, 1987
Export Citation:
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International Classes:
G01R31/26; H01L21/66; (IPC1-7): G01R31/26; H01L21/66