Title:
六塩化二ケイ素の精製方法及び高純度六塩化二ケイ素
Document Type and Number:
Japanese Patent JPWO2006109427
Kind Code:
A
Inventors:
Yoshinori Kimata
Ishikawa Koji
Hiroshi Suzuki
Ishikawa Koji
Hiroshi Suzuki
Application Number:
JP2006305441W
Publication Date:
October 19, 2006
Filing Date:
March 17, 2006
Export Citation:
Assignee:
Toagosei, Inc.
International Classes:
C01B33/107
Attorney, Agent or Firm:
Seiji Kojima
Yoshinori Hagino
Naoya Taniguchi
Yoshinori Hagino
Naoya Taniguchi