Title:
レジスト用重合体、レジスト組成物、および微細パターンが形成された基板の製造方法
Document Type and Number:
Japanese Patent JPWO2008081822
Kind Code:
A
Inventors:
Yasuda 敦
Akira Momose
Akira Momose
Application Number:
JP2007074974W
Publication Date:
July 10, 2008
Filing Date:
December 26, 2007
Export Citation:
Assignee:
Mitsubishi Rayon Co., Ltd.
International Classes:
C08F220/26; G03F7/039
Attorney, Agent or Firm:
Masatake Shiga
Yasuhiko Murayama
Takashi Watanabe
West Kazuya
Mitsuyoshi Suzuki
Norio Takahashi
Yasuhiko Murayama
Takashi Watanabe
West Kazuya
Mitsuyoshi Suzuki
Norio Takahashi
Previous Patent: JP2008081821
Next Patent: STEEL PLATE HAVING EXCELLENT FINE BLANKING WORKABILITY, AND MANUFACTURING METHOD THEREFOR
Next Patent: STEEL PLATE HAVING EXCELLENT FINE BLANKING WORKABILITY, AND MANUFACTURING METHOD THEREFOR