プラズマ生成用Ｐｔ・Ｒｈ系電極、プラズマ生成装置及びプラズマ処理装置 - Toyohashi University of Technology, National University Corporation

Title:

プラズマ生成用Ｐｔ・Ｒｈ系電極、プラズマ生成装置及びプラズマ処理装置

Document Type and Number:

Japanese Patent JPWO2008096881

Kind Code:

A

Inventors:

Akio Harada
Okawa 隆
Shigenobu Yamanaka
Hajime Shiki
Hiroshi Takigawa

Application Number:

JP2008052202W

Publication Date:

August 14, 2008

Filing Date:

February 08, 2008

Export Citation:

Assignee:

Toyohashi University of Technology, National University Corporation
DAIKEN CHEMICAL Industries

International Classes:

C22C5/04; H05H1/48; H05H1/34; B01J19/08

Attorney, Agent or Firm:

Hisami Miki

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