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Patent Searching and Data


Title:
イマージョンリソグラフィー用レジスト保護膜組成物
Document Type and Number:
Japanese Patent JPWO2008133311
Kind Code:
A
Inventors:
Osamu Yokokoji (Japan 1-12-1, Yuraku-cho, Chiyoda-ku, Tokyo Inside of Asahi Glass Co., Ltd.)
Yoko Takebe (Japan 1-12-1, Yuraku-cho, Chiyoda-ku, Tokyo Inside of Asahi Glass Co., Ltd.)
Application Number:
JP2008057981W
Publication Date:
November 06, 2008
Filing Date:
April 24, 2008
Export Citation:
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Assignee:
Asahi Glass Co., Ltd. (1-12-1, Yuraku-cho, Chiyoda-ku, Tokyo)
International Classes:
C08L33/14; C08F220/22; G03F7/11; H01L21/027; G03F7/38; C08F232/08
Attorney, Agent or Firm:
Saichi Suyama