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Patent Searching and Data


Title:
レジスト下層膜形成用組成物
Document Type and Number:
Japanese Patent JPWO2008143302
Kind Code:
A
Inventors:
Yosuke Imano (Inside of 5-6-10, Tsukiji, Chuo-ku, Tokyo JSR, Inc.)
Nomura 仲篤 (Inside of 5-6-10, Tsukiji, Chuo-ku, Tokyo JSR, Inc.)
Application Number:
JP2008059387W
Publication Date:
November 27, 2008
Filing Date:
May 21, 2008
Export Citation:
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Assignee:
JSR, Inc. (1-9-2, Higashi-Shimbashi, Minato-ku, Tokyo)
International Classes:
G03F7/11; C08F232/08
Attorney, Agent or Firm:
Hiroyuki Sato
Shigeru Koike
Koji Kikawa
Ippei Watanabe
Sugano Chongqing