Title:
弾性波素子
Document Type and Number:
Japanese Patent JPWO2008146449
Kind Code:
A1
Abstract:
弾性波素子は、圧電基板と、圧電基板上に設けられた櫛形電極と、櫛形電極を覆う酸化ケイ素膜と、酸化ケイ素膜上に設けられた酸化窒化ケイ素膜とを備える。酸化ケイ素膜の膜厚Ｈと圧電基板を伝播する弾性波の波長λはＨ／λ≧０．１５の関係を満たす。この弾性波素子は弾性波の伝播特性の変動を抑制し、高い信頼性を有する。
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Inventors:
Iwasaki Yuuo
Yuki Ueguchi
Yousuke Hamaoka
Yuki Ueguchi
Yousuke Hamaoka
Application Number:
JP2009516166A
Publication Date:
August 19, 2010
Filing Date:
May 09, 2008
Export Citation:
Assignee:
Panasonic Corporation
International Classes:
H03H9/145; H01L41/09; H01L41/18; H01L41/23; H03H9/64
Domestic Patent References:
| JP2005348139A | 2005-12-15 | |||
| JP2003198321A | 2003-07-11 | |||
| JP2007028297A | 2007-02-01 |
Attorney, Agent or Firm:
Hiroki Naito
Daisuke Nagano
Kentaro Fujii
Daisuke Nagano
Kentaro Fujii