Title:
マイクロ波プラズマ処理装置の天板、プラズマ処理装置およびプラズマ処理方法
Document Type and Number:
Japanese Patent JPWO2009101927
Kind Code:
A
Inventors:
Rice field 才忠
Kiyotaka Ishibashi
Toshihisa Nozawa
Kiyotaka Ishibashi
Toshihisa Nozawa
Application Number:
JP2009052200W
Publication Date:
August 20, 2009
Filing Date:
February 10, 2009
Export Citation:
Assignee:
Tokyo Electron, Ltd.
International Classes:
H01L21/3065; H05H1/46
Attorney, Agent or Firm:
Mitsuru Kimura