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Patent Searching and Data


Title:
重合性基を有する糖誘導体及びそれを用いたレジスト材料
Document Type and Number:
Japanese Patent JPWO2011021398
Kind Code:
A
Inventors:
Uenoyama 義崇 (1-1, Anesaki Kaigan, Ichihara-shi, Chiba-ken)
Katsuki Ito (1-1, Anesaki Kaigan, Ichihara-shi, Chiba-ken)
Hidetoshi Ono (1-1, Anesaki Kaigan, Ichihara-shi, Chiba-ken)
Naoya Kono (1-1, Anesaki Kaigan, Ichihara-shi, Chiba-ken)
Murakami Future (1-1, Anesaki Kaigan, Ichihara-shi, Chiba-ken)
Shinji Tanaka (1-1, Anesaki Kaigan, Ichihara-shi, Chiba-ken)
Application Number:
JP2010005138W
Publication Date:
January 17, 2013
Filing Date:
August 20, 2010
Export Citation:
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Assignee:
Idemitsu Kosan, Inc. (3-1-1, Marunouchi, Chiyoda-ku, Tokyo)
International Classes:
G03F7/039; C08F20/28; H01L21/027; C07H13/06; G03F7/11; C07H9/04; C08G65/18; C08G65/08
Attorney, Agent or Firm:
Kihei Watanabe
Yuko Tanaka
Takeshi Sato