Title:
ポンプユニット，ロードロックチャンバの排気装置，及び真空装置
Document Type and Number:
Japanese Patent JPWO2011052675
Kind Code:
A
Inventors:
Toshio Suzuki
Application Number:
JP2010069155W
Publication Date:
March 21, 2013
Filing Date:
October 28, 2010
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
F04B37/16
Attorney, Agent or Firm:
Masatake Shiga
Shingo Suzuki
Shingo Suzuki