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Title:
研磨ヘッド及び研磨装置
Document Type and Number:
Japanese Patent JPWO2013001719
Kind Code:
A
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Inventors:
Hisashi Masumura
Application Number:
JP2012003598W
Publication Date:
February 23, 2015
Filing Date:
May 31, 2012
Export Citation:
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Assignee:
Shin-Etsu Handotai Co., Ltd.
International Classes:
H01L21/304; B24B37/30
Attorney, Agent or Firm:
Good Miya Mikio



 
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