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Patent Searching and Data


Title:
アクチュエータ素子及び該アクチュエータ素子の製造方法
Document Type and Number:
Japanese Patent JPWO2013027696
Kind Code:
A
Inventors:
Shozo Odera (1-10-1, Higashi-Kotari, Nagaokakyo-shi, Kyoto Inside of Murata Manufacturing)
Application Number:
JP2012070980W
Publication Date:
March 19, 2015
Filing Date:
August 20, 2012
Export Citation:
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Assignee:
Murata Manufacturing Co., Ltd. (1-10-1, Higashi-Kotari, Nagaokakyo-shi, Kyoto)
International Classes:
H01L41/09; H01L41/193; H01L41/297; H01L41/047; H01L41/293; H01L41/083; H01L41/087
Attorney, Agent or Firm:
Masaya Fukunaga