Title:
成膜方法及び成膜装置
Document Type and Number:
Japanese Patent JPWO2013046918
Kind Code:
A
Inventors:
Ichiro Shiono
Wood Tatsuya
姜 Tomomatsu
Changchiang 亦周
Miyauchi 充祐
Shingo Samori
Wood Tatsuya
姜 Tomomatsu
Changchiang 亦周
Miyauchi 充祐
Shingo Samori
Application Number:
JP2012069714W
Publication Date:
March 26, 2015
Filing Date:
August 02, 2012
Export Citation:
Assignee:
Incorporated company synchrone
International Classes:
C23C14/02; C23C14/12; C23C14/08; G02B1/11
Attorney, Agent or Firm:
Koichiro Okura
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