Title:
露光制御装置
Document Type and Number:
Japanese Patent JPWO2013084489
Kind Code:
A1
Abstract:
本願に開示された露光制御装置は、光路上に配置される露光制御装置であって、特定方向に偏光した光を透過させる特性を有する第１の領域及び前記特定方向に偏光した光を透過させる特性を有しない第２の領域をそれぞれが有する第１及び第２の光量調節板を備え、前記第１及び第２の光量調節板を回転させることによって光量を調節する。
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Inventors:
Shunsuke Yasuki
Kozo Ezawa
Kozo Ezawa
Application Number:
JP2013548089A
Publication Date:
April 27, 2015
Filing Date:
December 05, 2012
Export Citation:
Assignee:
Panasonic IP Management Co., Ltd.
International Classes:
G03B9/02; G03B11/00
Domestic Patent References:
| JP2001061165A | 2001-03-06 | |||
| JP2008096461A | 2008-04-24 | |||
| JPS62178A | 1987-01-06 | |||
| JPH04212117A | 1992-08-03 | |||
| JPH09166518A | 1997-06-24 | |||
| JP2003035922A | 2003-02-07 | |||
| JP2001061165A | 2001-03-06 | |||
| JP2008096461A | 2008-04-24 |
Attorney, Agent or Firm:
Seiji Okuda
Osamu Kita
Michi Kajitani
Akiko Miyake
Hidetaka Okabe
Tohru Kawakita
Osamu Kita
Michi Kajitani
Akiko Miyake
Hidetaka Okabe
Tohru Kawakita
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