Title:
パターン評価方法およびパターン評価装置
Document Type and Number:
Japanese Patent JPWO2013118613
Kind Code:
A
Inventors:
Atsushi Miyamoto
Osaki Mayuka
Maki Kimura
Chie Shishido
Osaki Mayuka
Maki Kimura
Chie Shishido
Application Number:
JP2013051945W
Publication Date:
May 11, 2015
Filing Date:
January 30, 2013
Export Citation:
Assignee:
Hitachi High-Technologies Corp.
International Classes:
G01B15/00; G01B15/04
Attorney, Agent or Firm:
Manabu Inoue
Yuji Toda
Shigemi Iwasaki
Yuji Toda
Shigemi Iwasaki
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