Title:
反射結像光学系、露光装置、およびデバイス製造方法
Document Type and Number:
Japanese Patent JPWO2013118615
Kind Code:
A
Inventors:
Yoshio Kawabe
Application Number:
JP2013051961W
Publication Date:
May 11, 2015
Filing Date:
January 30, 2013
Export Citation:
Assignee:
NIKON CORP.
International Classes:
G03F7/20; G02B19/00; G02B17/00; H01L21/027
Attorney, Agent or Firm:
Takao Yamaguchi