Title:
研磨液組成物
Document Type and Number:
Japanese Patent JPWO2018062403
Kind Code:
A1
Abstract:
研磨速度を確保しつつ、研磨選択性の向上及び研磨ムラの抑制が可能な研磨液組成物の提供。本開示は、酸化セリウム粒子Ａと、重量平均分子量が８００以上２８００以下である多糖Ｂと、水とを含有する、研磨液組成物に関する。
Inventors:
Yoshihiko Doi
Application Number:
JP2018542867A
Publication Date:
July 11, 2019
Filing Date:
September 28, 2017
Export Citation:
Assignee:
Kao Corporation
International Classes:
H01L21/304; B24B37/00; C09G1/02; C09K3/14
Domestic Patent References:
| JP2009065041A | 2009-03-26 | |||
| JP2016069428A | 2016-05-09 | |||
| JP2015008212A | 2015-01-15 | |||
| JP2012109287A | 2012-06-07 |
Foreign References:
| WO2016143797A1 | 2016-09-15 |
Attorney, Agent or Firm:
Patent business corporation Ikeuchi and Partners