Title:
酸化物焼結体及びスパッタリングターゲット
Document Type and Number:
Japanese Patent JPWO2018066547
Kind Code:
A1
Abstract:
ペロブスカイト相及びＩｎ２Ｏ３で表されるビックスバイト相を含む酸化物焼結体。
Inventors:
Kazuyoshi Inoue
Masatoshi Shibata
Shigekazu Sakai
Masatoshi Shibata
Shigekazu Sakai
Application Number:
JP2017562795A
Publication Date:
October 11, 2018
Filing Date:
October 03, 2017
Export Citation:
Assignee:
IDEMITSU KOSAN CO.,LTD.
International Classes:
C04B35/01; C04B35/44; C04B35/50; C23C14/34; H01L21/336; H01L29/786
Attorney, Agent or Firm:
Heiwa International Patent Office